MEMS design, fabrication, characterization, and packaging

MEMS design, fabrication, characterization, and packaging

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30 May-1 June 2001, Edinburgh, UK Uwe F. W. Behringer, Deepak Uttamchandani, Society of Photo-optical ... Schematic diagram of an oscillator SAW sensor with a SAW resonator The schematic diagram of IDT and reflectors in Fig. 2 showsanbsp;...


Title:MEMS design, fabrication, characterization, and packaging
Author: Uwe F. W. Behringer, Deepak Uttamchandani, Society of Photo-optical Instrumentation Engineers, Scottish Enterprise, European Optical Society, Institution of Electrical Engineers
Publisher:Society of Photo Optical - 2001
ISBN-13:

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